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Polymer microfabrication technologies for microfluidic systems

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Abstract

Polymers have assumed the leading role as substrate materials for microfluidic devices in recent years. They offer a broad range of material parameters as well as material and surface chemical properties which enable microscopic design features that cannot be realised by any other class of materials. A similar range of fabrication technologies exist to generate microfluidic devices from these materials. This review will introduce the currently relevant microfabrication technologies such as replication methods like hot embossing, injection molding, microthermoforming and casting as well as photodefining methods like lithography and laser ablation for microfluidic systems and discuss academic and industrial considerations for their use. A section on back-end processing completes the overview.

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Abbreviations

CE:

Capillary electrophoresis

COC/COP:

Cycloolefin/copolymer

DT:

Decomposition temperature

HDT:

Heat distortion temperature

LIGA:

Lithographie (lithography), galvanoformung (electroplating), abformung (molding)

MEMS:

Micro electromechanical systems

μ-TAS:

Miniaturized total analysis system

μ-EDM:

Micro-electrode discharge machining

MST:

Microsystem technology

TAS:

Total analysis system

T g :

Glass transition temperature

PC:

Polycarbonate

PDMS:

Poly(dimethylsiloxane)

PE:

Polyethylene

PEEK:

Polyetheretherketone

PFPE:

Perfluoropolyether

PI:

Polyimide

PMMA:

Poly(methyl methacrylate)

POC:

Point-of-care

PP:

Polypropylene

PS:

Polystyrene

TPE:

Thermoset polyester

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Acknowledgements

We would like to thank Bonnie Gray from Simon Fraser University, Turtle Brennen from Agilent Technologies, Enrico Piechotka from Jenoptik Laser Optik Systeme GmbH, Prof. Roland Zengerle from IMTEK, University of Freiburg, Stefan Drese from IMM, Mainz, Prof. Heinz Kück from HSG-IMAT and Max Sonnleitner from Nanoident Technologies AG for the kind provision of the figures. We thank Susanne Haldrich for her support in the literature research.

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Becker, H., Gärtner, C. Polymer microfabrication technologies for microfluidic systems. Anal Bioanal Chem 390, 89–111 (2008). https://doi.org/10.1007/s00216-007-1692-2

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